Columnar microstructure in step-graded Si1-xGex/Si(001) structures with low
threading dislocation densities has been determined using high angular resolution (~0.005)) x-ray
microdiffraction. X-ray rocking curves of a 3 lm-thick strain-relaxed Si0.83Ge0.17 film show
many sharp peaks and can be simulated with a model having a set of Gaussians having narrow
angular widths (0.013))-0.02)) and local ranges of tilt angles varying from 0.05) to 0.2). These
peaks correspond to individual tilted rectangular columnar micrograins having similar (001)
lattice spacings and average areas of 0.8 to 2.0 lm2.
By: D. E. Eastman, C. B. Stagarescu, G. Xu, Patricia M. Mooney, Jean L. Jordan-Sweet, B. Lai, Z. Cai
Published in: Physical Review Letters, volume 88, (no 15), pages 6101+ in 2002
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