Local Electrochemical Oxidation/Reduction: First Step Towards a New Lithography

We have recently shown that it is possible to electrochemically oxidize {\em c}-axis La$_2$CuO$_4$ thin films grown on different substrates. The electrochemical oxidation was subsequently performed on a {\em local scale}, i.e.\ oxygen rich regions were induced in an otherwise oxygen deficient matrix. This extra oxygen created superconducting regions in the insulating matrix. This new lithographic technique does not require the addition or removal of large amounts of material, nor does it induce significant height differences. (Dept480)

By: Jean-Pierre Locquet

Published in: Physica C, volume 263, (no 14), pages 160-3 in 1996

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