Novel Substrate Contact Structure For High-Q Silicon-Integrated Spiral Inductors

By: Joachim N. Burghartz, Albert E. Ruehli, Keith A. Jenkins, Mehmet Soyuer, Dominique Nguyen-Ngoc

Published in: Technical Digest of the International Electron Devices Meeting - 1997. New York, NY, IEEE Computer Society Press, 1997. p. 55-8, IEEE in 1997

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