Performance degradation of small silicon devices caused by long-range Coulomb interactions

        In small silicon devices, conduction electrons in the channel
        are subject to long-range Coulomb interactions with electrons in the
        heavily-doped drain, source, and gate regions. We show that for devices
        with channel lengths shorter than about 40~nm and oxides thinner than
        2.5 nm these interactions cause a reduction of the electron velocity. We
        present results obtained using both semiclassical two-dimensional self-
        consistent Monte Carlo-Poisson simulations and a quantum-mechanical
        model based on electron scattering from gate-oxide interface plasmons.

By: M. V. Fischetti and S. E. Laux

Published in: RC21634 in 2000

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