Characterizing Probe Performance in the Aberration Corrected STEM

Sub-Angstrom imaging using the 120kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multi-slice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell structures in the [110] and [211] projections illustrate this finding. Atomic movement ubiquitous under the electron beam and, using fast image acquisition, can illuminate atomic level processes that might be missed in still images.

By: P. E. Batson

Published in: RC23815 in 2005


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