Electrodeposition For Hi-MEMS With Special Reference to Fabrication of a Magnetic Mini-Motor

By: E. J. O'Sullivan, E. I. Cooper, L. T. Romankiw, J. Horkans, K. T. Kwietniak, J. Tornello, C. Jahnes, I. Babich, N. C. LaBianca, S. Krongelb, J. M. Cotte, P. Trouilloud

Published in: RC20898 in 1997

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