Low Energy Electron Beam Top Surface Image Processing Using Chemically Amplified AXT Resist

Copyright © (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

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By: C. S. Whelan, D. M. Tanenbaum, D. C. LaTulipe, M. Isaacson, H. G. Craighead

Published in: Journal of Vacuum Science and Technology B, volume 15, (no 6), pages 2555-60 in 1997

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