Microfabrication and Parallel Operation of 5x5 2D AFM Cantilever Arrays for Data Storage and Imaging

In this paper we report on the microfabrication of a 5x5 2D cantilever array and its successful application to parallel imaging. The 5x5 array with integrated force sensing and tip heating has been
fabricated using a recently developed, all dry, silicon backside etching process. The levers on the array have integrated piezoresistive sensing. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x-y scanning and approach system as well as images taken with the system.