Cu Segregation at the Al(Cu)/Al(sub2)O(sub3) Interface

Copyright © (1996) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

We have investigated the segregational properties of polycrystalline Al(Cu) alloys in the composition range of 0.04 to 0.5 atomic % Cu using medium energy ion scattering. While Cu does not segregate to the bare surface, significant quantities of Cu are found at the interface between the Al(Cu) and aluminum oxide. By measuring the interfacial Cu concentration as a function of temperature, we have determined that the segregational energy is 0.21 plusmin 0.03 eV.

By: M. Copel, K.P. Rodbell and R.M. Tromp

Published in: Applied Physics Letters, volume 68, (no 12), pages 1625-7 in 1996

Please obtain a copy of this paper from your local library. IBM cannot distribute this paper externally.

Questions about this service can be mailed to reports@us.ibm.com .