Analysis of SiGe FET Device Structures On Silicon-On-Sapphire Substrates By X-Ray Diffraction

By: P. M. Mooney, J. O. Chu, J. L. Jordan-Sweet, W. B. Dubbelday, K. L. Kavanagh, I. Lagnado, B. S. Meyerson

Published in: RC21163 in 1998

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