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By: O. Albrektsen (Tele Danmark Res., Den.), H. W. M. Salemink, K. A. Morch (Tech. Univ. of Denmark) and A. R. Tholen (Tech. Univ. of Denmark)
Published in: Journal of Vacuum Science and Technology B, volume 12, (no 6), pages 3187-90 in 1994
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