Silicon Di-Interstitial In Ion-Implanted Silicon

Copyright © (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

By: Young H. Lee

Published in: Applied Physics Letters, volume 73, (no 8), pages 1119-21 in 1998

Please obtain a copy of this paper from your local library. IBM cannot distribute this paper externally.

Questions about this service can be mailed to reports@us.ibm.com .