Torsion Cantilever as Magnetic Torque Sensor

Copyright © (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

A newly designed macroscopic silicon cantilever for capacitive torque magnetometry has been developed and tested. It is based on torsion arms in order to obtain better damping against external vibrations than with ordinary cantilevers of similar size but anchored on one side. With the appropriate electronics and proper mechanical environment a torque resolution of Delta tau ~ 5x10**-13 Nm can be achieved.

By: C. Rossel, M. Willemin, A. Gasser, H. Rothuizen, and H. Keller

Published in: Review of Scientific Instruments, volume 69, (no ), pages 3199-203 in 1998

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