Al-Ta Bilayer as an Oxidation Resistant Barrier for Electrode Structures in High Dielectric Constant Capacitors

Copyright [©] (1999) by MRS. Permission to make digital or hard copies of part or all of this work for personal or classroom use is granted without fee provided that copies are not made or distrubuted for profit. To copy otherwise, to republish, to post on servers, or to redistribute to lists, requires prior specific permission and/or a fee.

By: A. Grill, C. Cabral, Jr.

Published in: Journal of Materials Research, volume 14, (no 4), pages 1581-8 in 1999

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