Copyright © (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics
By: R. Ludeke, E. Cartier, M. T. Cuberes(University of Castilla-La Mancha)
Published in: Journal of Vacuum Science and Technology A, volume 18, (no 4), pages 2153-9 in 2000
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