E-Beam Lithography of Curved Structures with an Enhanced Vector-Scan Pattern Generator Supporting Conic-Based Primitives

Copyright © (1994) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

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By: F. Vasey (CERN, Switz.), D. Prongue, H. Rothuizen and P. Vettiger

Published in: Journal of Vacuum Science and Technology B, volume 12, (no 6), pages 3460-4 in 1994

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