As device sizes continue to shrink, the design is increasingly affected by the variability in the back end of the line. We did a series of experiments to investigate the wire thickness/width variation impacts on RC and delay. The test results reveal that wire thickness and width variations have large impacts on RC and delay. Therefore, it is very important to understand and capture these kinds of variation impacts so as to improve product reliability and yield. In addition, we measure the dummy fill impacts on wire capacitance, and the test data show that the introduced capacitance can be up to 11.5%.
By: Hua Xiang; Ibrahim M. Elfadel; Ruchir Puri
Published in: RC23843 in 2006
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