11/99 Report: Investigations of UHV/CVD Deposition of SiGe Alloys on Silicon-on-Sapphire Substrate for Application to Device Fabrication Technology

        Abstract not available

By: P. M. Mooney, R. Hammond, S. J. Koester, J. O. Chu, J. A. Ott

Published in: RC21612 in 1999

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