CMOS-Compatible Wafer-Level Microdevice-Distribution Technology

By: R. Guerre, U. Drechsler, D. Jubin, M. Despont

Published in: Proc. Transducers 2007: 14th Int'l Conf. on Solid-State Sensors, Actuators and Microsystems, IEEE, p. 2087-2090 in 2007


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