Electrolessly Deposited Diffusion Barriers For Microelectronics

By: E. J. O'Sullivan, A. G. Schrott, M. Paunovic, C. J. Sambucetti, J. R. Marino, P. J. Bailey, S. Kaja, K. W> Semkow

Published in: IBM Journal of Research and Development, volume 42, (no 5), pages 607-20 in 1998

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