Extendibility of Cu Damascene to 0.1 um Wide Interconnections

By: C.-K. Hu, K. Y. Lee, L. Gignac, S. M. Rossnagel, C. Uzoh, K. Chan, P. Roper, J. M. E. Harper

Published in: Materials Research Society Symposia Proceedings. Warrendale, PA, Materials Research Society, vol.514, p.287-92 in 1998

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