Copyright © (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics
A method is developed for the fabrication of sub-100nm current-
perpendicular spin-valve junctions with low contact resistance. The approach
is to use a batch-fabricated trilayer template with the junction features defined
by a metal stencil layer and an undercut in the insulator. The spin-valve thin
film stack is deposited afterwards into the stencil, with the insulator undercut
providing the necessary magnetic isolation. Using this approach, reproducible
spin-current-induced magnetic switching is demonstrated for junctions down
to 50nm × 100nm in size.
By: J. Z. Sun, D. J. Monsma, D. W. Abraham, M. J. Rooks, R. H. Koch
Published in: Applied Physics Letters, volume 81, (no 12), pages 2202-4 in 2002
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