We have used silicon-oxy-nitride (SiON) waveguide technology to fabricate low-loss, compact and tunable integrated optical devices. Examples of devices realized in this technology include thermo-optically tunable gain equalizers and flat-passband add-drop filters.
By: F. Horst, R. Beyeler, G.L. Bona, R. Germann, B. Offrein, C.G.H. Roeloffzen, H.W.M. Salemink and D. Wiesmann
Published in: RZ3287 in 2000
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