Characterization of Bulk and Interface Properties of Dielectric Layers and Stacks

By: H.F. Okorn-Schmidt, E. P. Gusev, D. A. Buchanan, E.Cartier, D. L.Rath, A.Callegari, S.Guha, N .A.Bojarczuk, M. Copel, M. Gribelyuk

Published in: RC21698 in 2000

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