Ta and TaN Adhesion to High Temperature Fluorinated Polyimides: Surface and Interface Chemistry

By: K.-W. Lee, E. Simonyi, C. Jahnes

Published in: Journal of Adhesion Science and Technology, volume 12, (no 7), pages 773-90 in 1998

Please obtain a copy of this paper from your local library. IBM cannot distribute this paper externally.

Questions about this service can be mailed to reports@us.ibm.com .