Electron Beam Microcolumns for Nanolithography

Copyright © (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

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By: T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, B. W. Hussey and S. Zolgharnain (Columbia Univ.)

Published in: Journal of Applied Physics, volume 81, (no 1), pages 461-5 in 1997

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