Effects of Argon Addition to a Platinum Dry Etch Process

Copyright © (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

By: K. R. Milkove, J. A. Coffin, C. Dziobkowski

Published in: Journal of Vacuum Science and Technology A, volume 16, (no 3), pages 1483-8 in 1998

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