Local Electrochemical Oxidation/Reduction: First Step towards a New Lithography?

Using c-axis La2CuO4 thin films, we first demonstrate that the electrochemical oxidation mainly occurs along the c-axis. Then we induce oxygen-rich regions electrochemically into an otherwise oxygen-deficient matrix. On a microscopic scale the extra oxygen introduced creates metallic and/or superconducting regions in the insulating matrix. Contrary to other lithographic techniques in which large amounts of material are either removed or deposited, this technique does not induce significant height differences.