8/99 Report: Investigations of UHV/CVD Deposition of SiGe Alloys on Silicon-on-Sapphire Substrates for Application to Device Fabrication Technology

        There is no abstract available.

By: P.M. Mooney, R. Hammond, J.A. Ott, J.O. Chu

Published in: RC21549 in 1999

This Research Report is not available electronically. Please request a copy from the contact listed below. IBM employees should contact ITIRC for a copy.

Questions about this service can be mailed to reports@us.ibm.com .