We present a novel chemical sensor based on a micromechanical array of silicon cantilevers sensitized for the detection of analytes using cantilever coatings such as metals, self-assembled monolayers, or polymers. Chemical reactions are transduced into a mechanical response and read out using an optical beam-deflection technique. Detection of primary alcohols, natural flavors, and water vapor is demonstrated.
By: H. P. Lang, F. M. Battiston, M. K. Baller, R. Berger, J.-P. Ramseyer, P. Fornaro, E. Meyer, H.-J. Güntherodt, C. Andreoli, J. Brugger, M. Despont, P. Vettiger, J. H. Fabian, T. Mezzacasa, L. Scandella, Ch. Gerber, J. K. Gimzewski
Published in: Micro Total Analysis Systems, ed. by D.J. Harrison and A. van den Berg. , Dordrecht, Kluwer, p.57-60 in 1999
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