Dynamic force microscopy by means of the phase-controlled oscillator method

Copyright © (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

Dynamic force microscopy, a technique also known as non-contact force microscopy, has proved to be a powerful tool for atomic resolution imaging. A number of schemes have been developed, but recently the oscillator method has become the preferred operating mode. Here, the force sensor acts as resonator in an active feedback circuit. A practical implementation of the method is described and the underlying key concepts are discussed. It is shown that
a tracking oscillator excitation scheme is superior to the more standard direct feedback method for cases in which
the force sensor exhibits only a weak resonance enhancement. Furthermore, the simultaneous measurement of dissipative interaction channels is an important extension of dynamic force microscopy. It allows one to differentiate between sample materials via their plasto-mechanical response. As an example, a Cr test grating has been imaged
in the constant force gradient mode. The dissipation measured on Cr-covered areas is significantly lower than that
on the bare quartz glass substrate, which enables one to distinguish between the two materials with a lateral resolution comparable to that of the topographic image.

By: U. Duerig , H.R. Steinauer and N. Blanc

Published in: Journal of Applied Physics, volume 82, (no 8), pages 3641-51 in 1997

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