Ceramic-based wiring has been used in IBM in high-performance multi-chip module (MCM) carriers since the early 1980s. These types of carriers can provide very high wiring and power densities. Conductors are generally screened on individual ceramic sheets that are laminated and sintered at greater than 9000 C. The high temperature process requires the use of copper paste metallization with higher resistivity than bulk copper and the punched-via fabrication imposes the use of meshed ground planes. Typical MCMs can have close to 100 layers [1] with 200–400 mm via pitch. In the case of single-chip modules (SCM), hundreds of signal I/O’s on 100-200 mm pitch redistribute to the coarser module wiring. The fan-out, the hollow shielding, and the sparse and long vias generate large signal distortion and crosstalk between signal layers and via columns. This paper describes the modeling and measurement of representative glass-ceramic based wiring for both SCM and MCM applications.
By: Sungjun Chun, Anand Haridass, Alina Deutsch, Barry Rubin, Christopher Surovic, Erich Klink, Daniel O'Connor, Hsichang Liu, Christopher Spring, Thomas-Michael Winkel, Warren Dyckman, George Katopis, Gerard Kopcsay
Published in: RC23518 in 2005
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