2Q'96 Report: Investigations of Ultra High Vacuum Chemical Vapor Deposition of Silicon Germanium Alloys on Silicon-on-Sapphire Substrates For Application to Device Fabrication Technology

No Abstract Available.

By: J. A. Ott, P. M. Mooney, J. O. Chu, B. S. Meyerson

Published in: RC20828 in 1997

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