Investigations of UHV/CVD Deposition of SiGe Alloys on Silicon-on-Sapphire Substrates for Application to Device Fabrication Technology: Quarterly Report: February-April 2002

A program review meeting with Isaac Lagnado of the Space and Warfare Systems Center, San Diego, was held at IBM on May 8, 2002. Presentations included a materials update (Pat Mooney) and a progress report on divider circuit fabrication run (Dinkar Singh).

By: P. M. Mooney, D. V. Singh, J. O. Chu, J. A. Ott, V. Patel, S. J. Koester, A. Grill

Published in: RC22459 in 2002

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