1Q'97 Report: Investigations of Ultra High Vacuum Chemical Vapor Deposition of Silicon Germanium Alloys on Silicon-on-Sapphire Substrates for Application to Device Fabrication Technology

By: P. M. Mooney, J. A. Ott, J. O. Chu, J. L. Jordan-Sweet, B. S. Meyerson

Published in: RC20844 in 1997

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