Planar Micromagnetic X/Y/Z Scanner with Five Degrees of Freedom

Progress with scanning probe techniques such as STM and AFM has generated a need for compact cheap three-dimensional scanning and approaching systems. This paper describes the fabrication and testing of a planar, micromechanical magnetic x-y-z scanner/stage with five degrees of freedom using batch fabrication techniques. A silicon wafer is etched in such a way that conducting planar coils can be electroplated within the silicon. Springs are also fabricated at the same time from copper. The final result is a movable platform with coils suspended by springs. Magnets are placed on a plane under the coils with a suitable gap separating the magnets and platform so that they do not make contact. The poles of the magnets are arranged in such a way that when current is passed through coils forces generated on the platform can move it in x, y and z directions and rotate a little about each axis.