Defect Generation and Reliability of Ultra-thin SiO2 at Low Voltage

By: J. H. Stathis, D. J. DiMaria

Published in: Physics and Chemistry of SiO2 and the Si-SiO2 Interface - 4, Electrochemical Society Series, vol. 2000, no. 2 ed. by H. Z. Massoud, I. J. R. Baumvol, M. Hirose, E. H. Poindexter. , Pennington, Electrochemical Society, p.33-46 in 2000

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