Formation of a Crystalline Metal-Rich Silicide In Thin Film Titanium/Silicon Reactions

By: L. A. Clevenger, C. Cabral, Jr., R. A. Roy, C. Lavoie, J. Jordan-Sweet, S. Brauer, G. Morales, K. F. Ludwig, Jr., G. B. Stephenson

Published in: RC20201 in 1995

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