This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30x30x2 mm3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
By: H. Rothuizen, U. Drechsler, G. Genolet, W. Häberle, M. Lutwyche, R. Stutz, R. Widmer, P. Vettiger
Published in: Microelectronic Engineering, volume 53, (no 1-4), pages 509-12 in 2000
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