Copyright © (1993) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics
By: Detlev A. Gruetzmacher, T. O. Sedgwick, G. A,. Northrop, A. R. Powell, V. P. Kesan
Published in: Journal of Vacuum Science and Technology B, volume 11, (no 3), pages 1083-1088 in 1993
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